Power supply for precision e-beam applications

Spellman High Voltage Electronics Corporation announces the introduction of the VS100 high voltage power supply, specifically designed for precision electron beam applications like semiconductor nano-lithography, micro-optics and development mask work. Demanding performance specifications such as ultra low ripple (less than 75mVp-p, for 100kV at 100uA), high stability and excellent regulation parameters make the VS100 uniquely configured as the preferred electron beam accelerator source when accuracy and reliability is paramount. A passive redundant, high voltage divider has been incorporated into the encapsulated high voltage output section.

The feedback signal generated by this second divider is isolated from the regulating control electronics circuitry.

This feature alerts the user of any power supply output inconsistencies that might occur due to the unlikely occurrence of problems with the main regulating feedback divider circuitry.

The oil-free, solid encapsulated high voltage output section eliminates any user maintenance issues, while isolating the output circuits from environmental variables.

Conservative high voltage packaging practices and generous component de-ratings eliminate any partial discharge concerns, providing an exceptionally stable high voltage output.